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Chemical Vapor Deposition Pt-Ni alloy Using Pt(PF3)4 and Ni(PF3)4
Chemical Vapor Deposition Pt-Ni alloy Using Pt(PF3)4 and Ni(PF3)4
2008
Masato Ishikawa
Ikuyo Muramoto
Hideaki Machida
Satoshi Imai
Atsushi Ogura
Yoshio Ohshita
Keywords:
Chemical vapor deposition
Alloy
Hybrid physical-chemical vapor deposition
Combustion chemical vapor deposition
Materials science
Inorganic chemistry
Chemical engineering
Correction
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