Exposure machine and exposure method
2016
The invention provides an exposure machine and an exposure method. The exposure machine is provided with a bearing platform for transferring and fixing to-be-exposed substrates, and a fixing structure for fixing mask plates; and a certain inclined angle exists between the mask plates fixed by the fixing structure and the horizontal plane for exposing the to-be-exposed substrates. Pollution to the mask plates can be avoided, and the precision and accuracy of the exposure process are ensured.
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