Automatic grinding retainer abrasion compensation device and method

The invention discloses an automatic grinding retainer abrasion compensation device and method. The automatic grinding retainer abrasion compensation device comprises a grinding support, a grinding head installed at the bottom of the grinding support and a grinding retainer arranged on the edge of the grinding head. The grinding retainer and the grinding support are connected though lifting devices. By the adoption of the lifting devices, the grinding retainer is controlled by the lifting devices to descend, and compensation for the abrasion amount of the grinding retainer in the chemical mechanical grinding process is performed; and cost is low, control is convenient, the device is convenient to obtain, the stability of grinding pressure and flatness in the grinding process is guaranteed, and therefore the electrical property and the yield of the device can be stabilized.