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Method of manufacturing a plasma etching apparatus and a semiconductor device
Method of manufacturing a plasma etching apparatus and a semiconductor device
1992
takahiro maruyama
kenzi kawai
takahiro seiko
nobuo fuziwara
Keywords:
Dry etching
Semiconductor device
Reactive-ion etching
Etching (microfabrication)
Plasma etching
Materials science
Analytical chemistry
Optoelectronics
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