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Screening of ALD thin films for Cu diffusion barrier applications
Screening of ALD thin films for Cu diffusion barrier applications
2013
Riikka L. Puurunen
Jaakko Salonen
Arto Nurmela
Oili Ylivaara
Heikki Viljanen
Jyrki Molarius
Philippe Monnoyer
Sanna Yliniemi
Marko Pudas
Tero Lehto
Wei-Min Li
Keywords:
Diffusion barrier
Thin film
Materials science
Optoelectronics
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