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Generation of dislocation loops in Si by A-clusters during high-temperature treatments
Generation of dislocation loops in Si by A-clusters during high-temperature treatments
1991
M. Ya. Skorokhod
A. A. Serba
A. V. Makarov
V. I. Dunaevskii
V. V. Kostikov
D. N. Mandzyuk
Keywords:
Atomic physics
Doping
Cluster (physics)
Dislocation
Silicon
Chemistry
Mineralogy
Condensed matter physics
Correction
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