Novel Replication-Incompetent Vector Derived from Adenovirus Type 11 (Ad11) for Vaccination and Gene Therapy: Low Seroprevalence and Non-Cross-Reactivity with Ad5

In a micro device including a thin film wiring structure composed of plural thin film conductors, the thin film conductors are arranged on a base so as to be separated from one another by an inorganic insulating film. The gap width alpha between adjacent thin film conductors is defined by a thickness of the inorganic insulating film. The gap width alpha is set smaller than a width beta of each thin film conductor.