The Deterioration of Ultrapure Water Quality Under the Influence of Hydrogen Peroxide

In this paper, we report on our research an the use of the ultraviolet (UV) oxidation method to remove total organic carbon (TOC), while focusing on the phenomenon that dissolved oxygen (DO) increases at outlet of the column packed with ion exchange resins. In addition, we also researched the behavior of hydrogen peroxide that is said to be in an equilibrium state with OH (hydroxy) radical. As a result, it was found that hydrogen peroxide is decomposed/deoxidized in the ion exchange column, which leads to a DO increase at outlet of the column.