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Scalable Nanopatterning using Roll-based Jet and Flash Imprint Lithography
Scalable Nanopatterning using Roll-based Jet and Flash Imprint Lithography
2013
Sean Ahn
Michael N. Miller
Jack Yang
Maha Ganapathisubramanian
Marlon Menezes
Jin Choi
Frank Y. Xu
Douglas J. Resnick
S. V. Sreenivasan
Keywords:
Nanotechnology
Lithography
Materials science
Optoelectronics
Scalability
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