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Simulation of base boron out-diffusion in SiGe HBT
Simulation of base boron out-diffusion in SiGe HBT
2004
R. Kinder
P Beňo
L. Hulenyi
J. Gebner
Frank Schwierz
Juraj Breza
Alena Grmanová
Keywords:
Annealing (metallurgy)
Heterojunction bipolar transistor
Boron
Physics
Analytical chemistry
Capacitive sensing
Hybrid silicon laser
Silicon-germanium
Strained silicon
Photonic crystal
Optoelectronics
Correction
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