A method for self-diagnosis of a particle sensor for performing the method suitable particle sensors and the use thereof

The present invention relates to a method for self-diagnosis of a particle sensor comprising a valve disposed on the surface of the sensor measuring electrode system (1) having at least two interdigitated interdigital measuring electrodes (2, 3) and at least one under the measuring electrode system (1) arranged insulating layer (4) and / or at least one of the / insulating layer / s (4) disposed test electrode (5, 5 ') and / or under the / insulating layer / s (4) located heater (7) and / or under the / insulating layer / s (4) arranged temperature measuring device in which a capacitance between two measuring electrodes (2, 3) and / or between a measuring electrode (2; 3) and a test electrode (5; 5 ') and / or between a measuring electrode (2; 3) and the heater (7) and / or between a measuring electrode (2; 3) and the temperature measuring device under application of an AC or DC voltage and determined as a measure of the functional capability of the sensor is issued, and for performing the method suitable sensors and their use.