Real time monitoring technology for full aperture grating diffraction wavefront with high frequency error

Abstract To improve the grating ruling efficiency and success rate, this report documents a method to indirectly measure the error trajectory of space coordinates produced by ruling and indexing systems. The errors were corrected based on the proposed active control system. According to the residual errors after correction, a mathematical model of the full aperture grating diffraction wavefront with high frequency error information was reconstructed in real time. Based on this mathematical model, two gratings were ruled with or without the aid of an error correction system, respectively, and the reconstructed grating diffraction wavefront values were obtained to verify the effectiveness of this method. For larger gratings, the grating diffraction wavefront can also be reconstructed in real time with long time ruling. The experimental result demonstrated that the grating quality can be judged by monitoring the grating diffraction wavefront in real time.