Soft X-Ray Gratings

The micropatteming of multilayer gratings (MLG) using ultraviolet sub-ps laser pulses is described. A micromachiningsystem operating with a 0.5 ps KrF laser (248 nm) was used. Grating structures with a groove width in sub-pm regionwere created in Mo/Si, Si/Mo, W/Si and Si/W multilayers (MLs) with 5 (in one case 10) periods, each 7 —