Peculiarities of the formation of multicomponent AlN-TiB2-TiSi2 composite ceramics coatings during heat treatment

Results of studies of the morphology, elemental and phase compositions of coatings prepared by pulsed magnetron sputtering of the AlN-TiB2-TiSi2 composite ceramic target have been reported. The used technology allows us to prepare a protective amorphous-like layer with ordering areas with sizes up to 1 nm. The heat treatment of samples at 900 and 1300°C leads to the depletion of the coating surface of boride phases and the formation of α-Al2O3- and β]-TiO2-based protective films on the surface. The growth of crystallites of the nanostructured coating to 11–25 nm is observed. The annealing at 1300°C allows us to obtain the thermally stable crystalline state of substance, the nanohardness of which is 11 GPa.