Novel porous silicon/MEH-PPV nanohybrid electrical sensor for sensitive detection of liquid methanol

Abstract A capacitive sensor based on the Poly[2-methoxy-5-(2'-ethylhexyloxy)-1,4-phenylene vinylene] (MEH-PPV) polymer infiltrated into porous silicon (PSi) layer for sensitive detection of liquid methanol was design and demonstrated. The PSi was fabricated using a galvanostatic photo-electrochemical etching of crystalline Si. The polymer infiltration into the pores was achieved using spin coating and the electrical contact was created onto front side using Au-Ti composite via lithography and thermal evaporation techniques. The as-fabricated sensor exhibits sensitive, reversible and rapid capacitive response towards liquid methanol.