A method for processing an object

A method for processing an object comprises scanning a Partikelstrahis over a surface of the object and detecting caused by the scanning electron; determining a difference in height between the surface of the object and a predetermined area in each case for a plurality of locations on the surface, and depending on the damage caused by the scanning electron; determining an intensity of working for the plurality of locations on the surface, depending on the particular location for the respective height difference; and directing a Partikelstrahis to the plurality of locations, depending on the particular location for the respective working intensity to ablate material at the locations of the object or deposit.