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Continuous Scaling Methodology of Planar CMOS Transistors by Suppressing Fluctuation in Carrier Profile
Continuous Scaling Methodology of Planar CMOS Transistors by Suppressing Fluctuation in Carrier Profile
2007
H. Fukutome
Eiichi Yoshida
M Tajima
Takaaki Tanaka
Y. Sambonsugi
Yoshiyuki Momiyama
Keywords:
Transistor
Threshold voltage
Planar
Materials science
CMOS
Optoelectronics
Scaling
Correction
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