Structural optimization of the micro-membrane for a novel surface stress-based capacitive biosensor

Thin membrane transducer can be used for detecting the surface stress induced by the bio-molecular reactions. Designing research of the capacitive thin membrane transducer is proposed in the paper. The relationship between the sensitivity of the surface stress-based biosensors and the geometrical parameters of membrane was analyzed using the finite element method. The thermal strain mismatch resulting from the CTE difference of the two-layers of the membrane was also studied. The structure characteristics were analyzed systematically, including shape, size, gold coverage, which are normally considered in the design of the biosensors. Furthermore, a novel bi-membrane structure, which has high signal-to-noise ratio and can minimize the influence of the environment, is proposed.