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Piezoresistive detection of MEMS beam resonators for THz bolometer applications
Piezoresistive detection of MEMS beam resonators for THz bolometer applications
2021
Boqi Qiu
Nobuaki Watanabe
Ya Zhang
Naomi Nagai
Kazuhiko Hirakawa
Keywords:
Optoelectronics
Beam (structure)
Piezoresistive effect
Resonator
Terahertz radiation
Microelectromechanical systems
Materials science
Bolometer
Correction
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