A simplified reaction-diffusion system of chemically amplified resist process modeling for OPC
2010
As semiconductor manufacturing moves to 32nm and 22nm technology nodes with 193nm water immersion
lithography, the demand for more accurate OPC modeling is unprecedented to accommodate the diminishing
process margin. Among all the challenges, modeling the process of Chemically Amplified Resist (CAR) is a
difficult and critical one to overcome. The difficulty lies in the fact that it is an extremely complex physical and
chemical process. Although there are well-studied CAR process models, those are usually developed for TCAD
rigorous lithography simulators, making them unsuitable for OPC simulation tasks in view of their full-chip
capability at an acceptable turn-around time. In our recent endeavors, a simplified reaction-diffusion model capable
of full-chip simulation was investigated for simulating the Post-Exposure-Bake (PEB) step in a CAR process. This
model uses aerial image intensity and background base concentration as inputs along with a small number of
parameters to account for the diffusion and quenching of acid and base in the resist film. It is appropriate for OPC
models with regards to speed, accuracy and experimental tuning. Based on wafer measurement data, the parameters
can be regressed to optimize model prediction accuracy. This method has been tested to model numerous CAR
processes with wafer measurement data sets. Model residual of 1nm RMS and superior resist edge contour
predictions have been observed. Analysis has shown that the so-obtained resist models are separable from the effects
of optical system, i.e., the calibrated resist model with one illumination condition can be carried to a process with
different illumination conditions. It is shown that the simplified CAR system has great potential of being applicable
to full-chip OPC simulation.
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