Assist features for modeling three-dimensional mask effects in optical proximity correction
2007
Liberal use of assist features of both tones is an important component of the 45nm lithography strategy for many
layers. These features are often sized at λ/4 on the mask or smaller. Under these conditions, formerly successful
approximations of the mask near field using boundary layer methods or domain decomposition methods break
down. Rigorous simulations of the mask near field must include a three-dimensional (3D) Maxwell's equation
analysis, but these computations are cost-prohibitive for full-chip OPC, RET, and lithographic compliance
checking applications.
The purpose of this paper is to describe a simple and computationally efficient method that can improve model
fidelity for 45nm assist features of either tone, while still retaining computational simplicity. While the model
lacks the generality of a rigorous solution of Maxwell' sequations, it can be well-anchored to the real physics by
calibrating its performance to a lithographic TCAD mask simulator. The approach provides a balanced tradeo.
between speed and accuracy that makes it a superior approach to boundary layer and domain decomposition
methods, while retaining the capability to realistically be deployed on a full-chip lithography simulation.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI