High-precision correction method for two-dimensional platform error of three-dimensional coordinate measuring machine

2013 
The invention discloses a high-precision correction method for a two-dimensional platform error of a three-dimensional coordinate measuring machine. The high-precision correction method including utilizing a rigid grid plate with precision lower than or equal to a two-dimensional platform of the three-dimensional coordinate measuring machine as an auxiliary measuring device, separating an error of the two-dimensional platform to be measured and an error of a utilized grid plate scale from initial measured data via a least square method based self-correction algorithm according to coordinates of various marked points on the coordinate measuring machine in six-position state, and thereby realizing high-precision correction of the two-dimensional platform of the three-dimensional coordinate measuring machine. By the high-precision correction method, the two-dimensional platform errors of the three-dimensional coordinate measuring machine to be measured can be effectively obtained, the measurement precision can reach to the submicron grade. Meanwhile, the high-precision correction method requires no expensive special high-precision auxiliary devices, is high in reliability, provides the high-precision correction method for correcting the two-dimensional platform errors of the three-dimensional coordinate measuring machine, and has extremely high practical application value.
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