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EFFECT OF AL~O? ALD NANOCOATINGS ON THE THERMO-MECHANICAL BEHAVIOR OF Au/SI MEMS STRUCTURES
EFFECT OF AL~O? ALD NANOCOATINGS ON THE THERMO-MECHANICAL BEHAVIOR OF Au/SI MEMS STRUCTURES
2003
Kenneth P. Gall
Martin L. Dunnl
Michael Hulsel
Dudley S. Finch
Steven M. George
Keywords:
Scanning electron microscope
Nanotechnology
Microstructure
Microelectromechanical systems
Materials science
Stress relaxation
Composite material
Temperature cycling
thermo mechanical
Correction
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