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Novel Fluorinated Compounds that Improve Durability of Antistick Layer for Quartz Mold
Novel Fluorinated Compounds that Improve Durability of Antistick Layer for Quartz Mold
2014
Tsuneo Yamashita
Syuso Iyoshi
Makoto Okada
Shinji Matsui
Keywords:
Contact angle
Organic chemistry
Quartz
Perfluoropolyether
Resist
Composite material
Polymer chemistry
Materials science
Durability
Mold
Correction
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