Role of helium ion irradiation in the corrosion of CVD − SiC in molten LiF − NaF − KF salt

Abstract The role of helium ion irradiation in the corrosion of CVD − SiC in molten LiF − NaF − KF salt was studied. Results indicate that the corrosion of SiC relates to the diffusion of element Si. Impurities in molten LiF − NaF − KF salt react with SiC to drive the outward diffusion of element Si and graphitic carbon is further formed. Energetic helium ions break down the Si − C bonds to form defects. Slight disorder has little effect on the corrosion of SiC, while the amorphous induced by helium ion irradiation significantly enhances the diffusion of element Si and thus increases the corrosion of SiC.