High-speed micromachining with high-power picosecond ultraviolet lasers
2008
Highest precision and minimal thermal impact is achieved, using picosecond laser pulses for micromachining. Virtually
any material can be processed with outstanding quality. The use of ultraviolet (UV) pulses can provide additional
benefits in higher throughput and improved edge quality for materials like metals, glasses, semiconductors or ceramics.
The advanced oscillator-amplifier (MOPA) laser design, based on reliable Nd:YVO 4 -systems, enables power scaling of
IR-pulses, and led to a series of laser systems with a repetition rate as high as 1 MHz and average power levels ranging
from 10 W to well above 50 W. Harmonic generation to the visible (532 nm) and the UV (355 nm) reaches efficiencies
of 50%, providing powerful beams for cost effective high-speed micromachining with high throughput.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
0
References
6
Citations
NaN
KQI