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Structural and compositional investigation of high k praseodymium oxide rums deposited by MOCVD
Structural and compositional investigation of high k praseodymium oxide rums deposited by MOCVD
2018
R. Lonigro
Roberta G. Toro
Graziella Malandrino
C. Bongiorno
V. Raineri
I L FragaHt
Keywords:
High-κ dielectric
Oxide
Metalorganic vapour phase epitaxy
Praseodymium
Materials science
Analytical chemistry
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