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Investigation of key technologies for System-in-Package integration of inertial MEMS
Investigation of key technologies for System-in-Package integration of inertial MEMS
2009
Marenco
Reinert
Warnat.
Lange
Gruenzig
Allegato
Hillmann
Kostner
Guadagnuolo
Conte
Malecki
Friedel
Keywords:
System in package
Electronic engineering
Getter
Application-specific integrated circuit
Gyroscope
Inertial frame of reference
Microelectromechanical systems
Key (cryptography)
Computer science
CMOS
Correction
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