Multipurpose high vacuum laser ablation/thin film deposition system
1999
An instrumental system is described that combines an apparatus for pulsed laser deposition (PLD) with a vacuum “suitcase” for transport of air-sensitive compounds. Laser ablation, plume diagnostics, and thin-film deposition are readily accomplished through a flexible design. The PLD apparatus consists of two cubes coupled via a bellows assembly and whose distance is easily changed pneumatically. For both the PLD apparatus and the vacuum suitcase, compact-design considerations have been implemented. Consequently, the footprint of the PLD apparatus is relatively small, and the vacuum suitcase can be transported easily between sites.
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