Analysis of the Etching Behavior of ZnO Ceramics

Abstract ZnO ceramics doped with a small amount of Bi 2 O 3 and Sb 2 O 3 were prepared and their orientation-dependent etching patterns were analyzed. Three distinctive patterns produced by the oxidizing etchant HCl were observed: hexagonal etch pits on + C plane, triangular etch pits on prismatic plane, and hillocks of hexagonal pyramid on − C plane. From these results, the three-dimensional shape of etch pit could be suggested. The character of inversion boundary was also determined from the etching patterns.