Silica on Si waveguides for self-aligned fibre array coupling using flip-chip Si V-groove technique

Silica on silicon single-mode waveguide devices have been realised by a new process that allows for high precision alignment features for self-aligned waveguide to fibre array coupling, using an Si V-groove flip-chip opto-hybridisation technique. Submicrometre alignment precision in coupling the waveguide to cleaved or lensed fibre arrays results in low excess mounting losses of 0.2 and 0.5 dB, respectively.