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Reversible Actuation of Microstructures by Surface‐Chemical Modification of Thin‐Film Bilayers
Reversible Actuation of Microstructures by Surface‐Chemical Modification of Thin‐Film Bilayers
2010
Jatinder S. Randhawa
Michael D. Keung
Pawan Tyagi
David H. Gracias
Keywords:
Microstructure
Materials science
Actuator
Nanotechnology
Thin film
Self-assembly
Lithography
Chemical modification
Chromium
Copper
surface chemical
Correction
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