Development and calibration of a sub-millimeter three-component force sensor

Abstract A sub-millimeter three-component force sensor has been developed using silicon microfabrication technology. A polysilicon cross-beam, 300 μm × 300 μm, with 12 piezoresistive strain gauges integrated on it, is the elastic element of the sensor. The strains detected by the strain gauges are measures of the three orthogonal components of the force applied at the center of the cross-beam. Calibration of the sensor is achieved by generating electromagnetic forces on an aluminum cross-beam that is suspended over the sensor structure.