A silicon microactuator using integrated microfabrication technology

The authors propose a new type of MEMS actuator which is suitable for integration with read/write (R/W) head and AlTiC slider in hard disk drives (HDDs). Double-sided wafer patterning and adhesive wafer bonding techniques are used in fabrication. The displacement stroke of the R/W head, which attached on the MEMS actuator, can reach /spl plusmn/0.5 /spl mu/m when the input voltage is /spl plusmn/20 V. The dynamic performances of the MEMS actuator are simulated by the finite-element method.