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Impact of Annealing on Contact Formation and Stability of IGZO TFTs
Impact of Annealing on Contact Formation and Stability of IGZO TFTs
2014
Tarun Mudgal
N. Walsh
R. G. Manley
Karl D. Hirschman
Keywords:
Annealing (metallurgy)
Inorganic chemistry
Chemistry
contact formation
Chemical engineering
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