Effect of via/line temperature inhomogeneity on electromigration fast WLR results and how to get rid of inhomogeneities

Abstract Electromigration fWLR tests lack validity because of unresolved temperature inhomogeneities in the test structures. A new system quantifies the undesirable impact of temperature inhomogeneities on lifetime results and demonstrates that temperature gradients can be completely avoided for any process/material change or process instability in any common technology.