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Simulation-based and Analytic Modeling Approach to Determine an Appropriate Number of FOUPs in Wafer Fabs.
Simulation-based and Analytic Modeling Approach to Determine an Appropriate Number of FOUPs in Wafer Fabs.
2009
Lars Mönch
Jens Zimmermann
John W. Fowler
Scott J. Mason
Keywords:
Wafer
Manufacturing engineering
Engineering
simulation based
Correction
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