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Chemical Composition and Characterization of the Si/C Interface in Poly-Si Thin Films on Graphite Substrates
Chemical Composition and Characterization of the Si/C Interface in Poly-Si Thin Films on Graphite Substrates
1996
T. Reindl
T. Fuska
C. Walz
H. Cerva
R. Lemme
C. Weitzel
W. Kruehler
M. Pauli
Johannes Mueller
Keywords:
Thin film
Composite material
Chemical composition
Combustion chemical vapor deposition
Materials science
Carbon film
Graphite
Metallurgy
Correction
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