DMMP vapor detection with 50NM thick AlN films based microcantilevers

In this paper, we demonstrate the high sensing performances of a DMMP vapor sensor system based on 50 nm thick AlN film microcantilevers. These devices are particularly interesting for low power integrated gas sensors systems. One key factor for their gas sensing performances optimization relies on the reduction of the AlN layer thickness. Thanks to a digital PLL setup we demonstrate high frequency stability with an Allan deviation of 5.10 −8 . Finally, using DKAP polymer for surface functionalization of the cantilever, we measure DMMP vapor concentration down to 25 ppb and predict from frequency noise an ultimate resolution of 10 ppb at the level of the state of the art of DMMP sensing.