Bio-inspired hierarchical patterning of silicon by laser interference lithography.

This paper presents a facile approach for the rapid and maskless fabrication of hierarchical structures by multibeam laser interference. In the work, three- and four-beam laser interference lithographies were proposed to fabricate ordered multiscale surface structures instead of six or more beam interference with a complicated system setup. The pitch and shape of hierarchical structures can be controlled by adjusting the parameters of incident light. The experiment results have shown that the hierarchical anisotropy and isotropy surface structures can be fabricated by this method with the control of the parameters of each incident beam, which is in accordance with the theoretical analysis and computer simulations.