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Acemap > Paper > 研磨用冷凍ピンチャックの開発 (第1報):—研磨時の引張・せん断応力と大反りウエハの凝固変形—

研磨用冷凍ピンチャックの開発 (第1報):—研磨時の引張・せん断応力と大反りウエハの凝固変形—

2014 
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