Femtosecond laser micromachining of thin-film coatings in a high-voltage electrostatic field

The work is devoted to the problem of forming micro- and nanoscale elements topologies of high-resolution by means of controlled treatment of material surface with ultrashort laser pulses. The technology of processing thin-film coatings by the method of selective laser ablation is described. The possibility of using a high-voltage electrostatic field for collecting ablation products and preventing their deposition on the surface of formed microstructures is shown.