Manufacturability of low power CMOS technology solutions

This paper discusses manufacturability of state-of-the-art low power technologies. We report the results on two generations of bulk CMOS technologies, triple-well CMOS and Thin Film Silicon on Insulator (TFSOI) technologies. We present technology capabilities for several values of supply voltage and address the issue of performance scaling with the supply voltage reduction. Then we focus on the statistical characterization of these technologies and discuss both interchip and intrachip variations. Finally, we present the digital and analog designer perspectives on the low power IC operation.