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The Simulation of the Sputtered Particle Dynamics in the SPT Plume
The Simulation of the Sputtered Particle Dynamics in the SPT Plume
1997
M. A. Bishaev
K. V. Kalashnikov
V. Kim
V. A. Shavynika
S. Khartov
F. Scortecci
Keywords:
Plume
Materials science
particle dynamics
Mechanics
Correction
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