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Soft X-Ray Reflection Optics for X-Ray Projection Lithography Final Report CRADA No. TC-0191/0192-92
Soft X-Ray Reflection Optics for X-Ray Projection Lithography Final Report CRADA No. TC-0191/0192-92
2018
Don Kania
Jack Salvador
David Markle
Richard Foster
Keywords:
Lithography
X-ray
Materials science
Optics
soft x ray
Correction
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