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Designing high performance KrF and ArF single layer resists with methacrylate polymers.
Designing high performance KrF and ArF single layer resists with methacrylate polymers.
1993
Robert D. Allen
Gregory M. Wallraff
William D. Hinsberg
Willard Earl Conley
Roderick R. Kunz
Keywords:
Polymer
Organic chemistry
Methacrylate
Resist
Materials science
methacrylate polymers
Chemical engineering
single layer
Photochemistry
Correction
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