Li depth profile anomaly after radio-frequency hydrogen plasma processing of single crystal LiNbO3

Abstract Lithium niobate is processed in the hydrogen plasma of the radio-frequency glow discharge. This treatment causes a strong chemical reduction and outlet of lithium from the sample surface. The Li depth profiles are measured by Neutron Depth Profiling. The diffusion coefficient and the flux of escaping Li atoms are determined by fitting the experimental and calculated curves. An anomalous Li depth profile is measured if the plasma treatment is followed by reoxidation.