A raster splicing error control method and an adaptive control means

2014 
The present invention discloses an adaptive control method of a grating alignment errors can reduce the difficulty of stitching grating, to improve the stability of the splice. Be fixed by stitching after the first splicing sub-gratings, the grating and further enhance the stability, the display stages SCIENCES focal spot by the CCD area array, data generated by the sensor array, data analysis splicing error monitoring system by synchronizing the far field , to compensate for alignment errors by the error compensation mirror, reduce difficulty of stitching, and is capable of real time control of alignment errors.
    • Correction
    • Source
    • Cite
    • Save
    • Machine Reading By IdeaReader
    0
    References
    0
    Citations
    NaN
    KQI
    []