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Algorithms and Architectures for Some Problems in Multibeam Electron Beam Lithography and SEM Metrology
Algorithms and Architectures for Some Problems in Multibeam Electron Beam Lithography and SEM Metrology
2019
Narendra Chaudhary
Keywords:
Scanning electron microscope
Data compression
Materials science
Electron-beam lithography
Metrology
Deep learning
Optics
line edge roughness
Artificial intelligence
Correction
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