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Properties of Hafnium Oxide Deposited with Ozone or Oxygen Plasma
Properties of Hafnium Oxide Deposited with Ozone or Oxygen Plasma
2010
Mark J. Dalberth
Mark Sowa
Eric Deguns
Ritwik Bhatia
Adam Bertuch
Guo Liu
Ganesh Sundaram
Jill Svenja Becker
Keywords:
Oxygen
Plasma
Hafnium oxide
Inorganic chemistry
Ozone
Materials science
oxygen plasma
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